Lam Research's Dextro robot brings 2x precision to semiconductor maintenance

Lam Research has just rolled out Dextro, a new collaborative robot built specifically to tackle the challenges of maintaining semiconductor manufacturing equipment. This mobile robot is already up and running in several high-tech wafer fabs around the globe, taking care of anywhere from 50 to 100 chambers in Lam tools that need monthly maintenance.

Dextro is designed to solve some of the biggest challenges in semiconductor maintenance and has three standout features. First off, it installs consumable parts with more than twice the accuracy of manual labor, which helps boost etch performance at the edges of the wafer. The robot also tightens vacuum-sealing bolts to a precise specification, eliminating the usual 5 percent error rate from human hands. This reduces the risk of chamber temperature fluctuations that could throw off production.

In addition, Dextro has automated cleaning and polymer removal tech that can clear out side-wall build-up in the chamber without disassembling the lower chamber. This makes the whole process safer, too, by eliminating the need for protective gear like breathing masks, which were a must in manual cleaning.

Young Ju Kim, VP and head of the Memory Etch Technology Team at Samsung Electronics, shared his thoughts on the importance of fast and efficient maintenance: "When manufacturing equipment requires maintenance, the work must be done quickly and efficiently to avoid extended tool downtime and wasted cost. Error-free maintenance by Dextro helps drive improvements in production variability and yield."

Right now, Dextro works with Lam's Flex G and H series dielectric etch tools, and the plan is to expand its compatibility to more equipment by 2025. The system runs on a mobile cart and is controlled by fab techs or engineers, using different end-effectors for each maintenance task.